High sensitivity resist system with separably developable...

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B05D 3/06 (2006.01) G03F 7/039 (2006.01) G03F 7/095 (2006.01) H05K 3/14 (2006.01)

Patent

CA 1071455

HIGH SENSITIVITY RESIST SYSTEM FOR LIFT-OFF METALLIZATION Abstract of the Disclosure High sensitivity resist films for lift-off metallization are formed by coating a substrate with at least two layers of polymeric materials, each layer of which is developed by different developers that are mutually exclusive of one another. The resist can operate for lift-off at electron beam exposure equal to or greater than 5x10-6 coulombs/cm2.

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