High stability bimorph scanning tunneling microscope

Details High stability bimorph scanning tunneling microscope High stability bimorph scanning tunneling microscope

H - Electricity

01

J

358/10.1

H01J 37/00 (2006.01) H01L 41/09 (2006.01)

Patent

CA 1298416

Title High Stability Bimorph Scanning Tunneling Microscope Inventors Bradford L. Blackford Douglas C. Dahn Manfred H. Jericho Abstract of the Disclosure A novel scanning tunneling microscope (STM) is des- cribed which is constructed almost entirely of one metal e.g. aluminum and uses bimorph piezoelectric disks as the x, y, z drive elements. The design uses a simple, rugged tripod configuration for the fine motion drive arms. Coarse motion of the sample, which is mounted on an aluminum holder, is achieved by pushing, or pulling, with a piezoelectric louse. Differential thermal expan- sion effects are avoided by design, to first order,and the resulting drift is ? 0.5 .ANG. per minute after only a short warm-up period. It is easy to build and operate, and has good immunity to mechanical vibrations.

582057

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