C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 16/00 (2006.01) C23C 16/44 (2006.01) C23C 16/455 (2006.01) C30B 25/08 (2006.01) C30B 25/14 (2006.01) C30B 25/16 (2006.01)
Patent
CA 2334349
A cold wall reactor (10) having inner (14) and outer (12) walls defining an annular reactor cell (16). A susceptor (52) is rotatably mounted in the cell (16), and received wafers (53) to be treated by gases flowing axially through the cell (16). The outer wall (10) of the reactor is normally cooled, but is heated by a suitable furnace (210) to provide a hot wall reactor when cleaning of the cell (16) is required.
Les parois, intérieure (14) et extérieure (12), de ce réacteur à paroi froide (10) délimitent une cellule de réacteur annulaire (16). Un suscepteur (52), qui est monté rotatif dans la cellule (16), reçoit les tranches (53) à traiter par les gaz s'écoulant selon un plan axial dans la cellule (16). La paroi extérieure (10) du réacteur est, normalement, refroidie mais elle est chauffée au moyen d'un foyer approprié (210) afin de créer un réacteur à parois chaudes lorsqu'il est nécessaire de nettoyer la cellule (16).
Cornell Research Foundation Inc.
Macrae & Co.
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