F - Mech Eng,Light,Heat,Weapons – 16 – C
Patent
F - Mech Eng,Light,Heat,Weapons
16
C
308/1
F16C 32/06 (2006.01) B23Q 1/38 (2006.01) B23Q 1/62 (2006.01) G03F 7/20 (2006.01) H01J 37/20 (2006.01) H05K 13/00 (2006.01)
Patent
CA 1164028
Abstract of the Disclosure A high vacuum compatible X - Y positioning stage having an air bearing is provided. A pair of moveable carriages is mounted interior to an airtight chamber. Constraints allow movement of each carriage to only one horizontal direction, the directions of each carriage being orthogonal. Air inlet and outlet ports enter the chamber through apertures, and are mounted on the carriages and are moveable therewith. Airtight, flexible bellows form an airtight seal between the chamber and air ports at the temperatures. Pressurized air communicated through the ports to the carriage is constrained to exit the carriage via small orifices about the exterior thereof to form an air bearing. The air is constrained to exit the airtight chamber through a passageway mounted in the carriage and leading to the outlet port. A stage is mounted on one pair of ports. The other pair is mounted in a fixed position. The stage is moveable in an X - Y plane vis-a-vis the fixed position on a compensated air bearing.
406167
Control Data Corporation
Smart & Biggar
LandOfFree
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