H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/64 (2006.01) E05D 1/02 (2006.01) G02B 5/08 (2006.01) G02B 26/08 (2006.01) G02B 26/10 (2006.01)
Patent
CA 2149931
An improved hinge (12) for a micro-mechanical device (10). The hinge is fabricated from alternating layers (12a, 12b) of different materials. A first material is selected on the basis of its amenability to fabrication processes and a second material is chosen for its strength, or some other desired characteristic, relative to the first material.
Knipe Richard L.
Poradish Frank J.
Kirby Eades Gale Baker
Texas Instruments Incorporated
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