Holder for liquid phase epitaxial growth

Details Holder for liquid phase epitaxial growth Holder for liquid phase epitaxial growth

H - Electricity

01

L

148/2.55

H01L 21/368 (2006.01) C30B 19/06 (2006.01)

Patent

CA 1163538

A HOLDER FOR LIQUID PHASE EPITAXIAL GROWTH Abstract of the Disclosure A holder for liquid phase epitaxial (LPE) growth which eliminates mesas on the surface of the film is described. The holder has two legs to which a ring is connected. The ring has holding means so that it can hold one wafer or two wafers back-to-back. One of the two legs extends vertically below the first ring. In a preferred embodiment a second ring having holding means for a pair of wafers back-to-back is attached to the elongated leg. This holder structure prevents a film from the liquid melt from forming when the holder is withdrawn from the liquid growth solution, thereby eliminating the formation of mesas which occur when the film ruptures. SA979002

356809

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