Hollow cathode array and method of cleaning sheet stock...

Details Hollow cathode array and method of cleaning sheet stock... Hollow cathode array and method of cleaning sheet stock...

C - Chemistry, Metallurgy

25

F

C25F 3/04 (2006.01) C25F 7/00 (2006.01) H01J 37/32 (2006.01)

Patent

CA 2126731

ABSTRACT OF THE DISCLOSURE An array of hollow cathodes can be made by mounting a housing connected to a source of plasma precursor gas and to a source of power in a vacuum chamber, said housing having a plurality of uniformly spaced openings in a wall thereof into which a plasma can be generated. A substrate to be treated is mounted parallel to and spaced a preselected distance from said openings. In operation, a plurality of plasma torches is created extending from the openings which can plasma etch and remove coatings on said substrate.

Affiliated with

Also associated with

Rating

Hollow cathode array and method of cleaning sheet stock... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Hollow cathode array and method of cleaning sheet stock..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Hollow cathode array and method of cleaning sheet stock... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-2059516