Hollow cathode array for plasma generation

H - Electricity – 01 – J

Patent

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H01J 37/32 (2006.01)

Patent

CA 2348653

This invention relates to a cathode assembly for use in the creation of a discharge plasma. The cathode comprises a plurality of electrically conductive hollow plasma generating cells in an array, the cells being electrically connected to each other. The plasma generated can be used to modify surface properties of substrates, such as films, fibers, particles and other articles.

La présente invention concerne un ensemble cathodique destiné à la création d'un plasma de décharge. Cette cathode est constituée d'une pluralité de cellules creuses de génération de plasma électroconductrices. Ces cellules qui sont disposées en matrice, sont électriquement connectées les unes aux autres. Le plasma produit permet de modifier les propriétés de surface de substrats tels que films, fibres, particules et autres articles.

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