Hollow cathode enhanced plasma for high rate reactive ion...

Details Hollow cathode enhanced plasma for high rate reactive ion... Hollow cathode enhanced plasma for high rate reactive ion...

B - Operations, Transporting

44

C

204/96.03, 204/1

B44C 1/22 (2006.01) C03C 15/00 (2006.01) C23C 14/34 (2006.01) C23F 1/02 (2006.01) H01J 37/32 (2006.01)

Patent

CA 1283381

HOLLOW CATHODE ENHANCED PLASMA FOR HIGH RATE REACTIVE ION ETCHING AND DEPOSITION ABSTRACT A metallic hollow cathode electrode structure for use in a RF-RIE sputter/etch system. The electrode defines a critical aspect ratio hollow cathode volume. In accordance with one embodiment of the invention, the electrode structure may consist of two closely spaced metal elements separated by a distance of a few centimeters. The elements are electrically and structurally connected by supports around their outer rim. An RF voltage is applied between the improved hollow cathode electrode structure and an evacuated chamber containing same through a suitable matching network. A plasma gas is supplied to the system from a point outside the electrodes and a suitable pumping system is used to maintain operating pressures in the 0.1 to 400 millitorr range. Samples to be sputtered are then placed on either of the inside electrode surfaces for sputter/etching. The aspect ratio (longest dimension of one of the elements/spacing between the elements) should be at least 4. According to a further embodiment, the hollow cathode electrode structure is characterized by a single plate having a plurality of cylindrical chambers or holes therein, each hole producing a hollow cathode glow when the system is energized. The aspect ratio (largest dimension of the chamber cross-section/depth of the chamber) for this embodiment should be at least 1.5.

509327

Affiliated with

Also associated with

Rating

Hollow cathode enhanced plasma for high rate reactive ion... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Hollow cathode enhanced plasma for high rate reactive ion..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Hollow cathode enhanced plasma for high rate reactive ion... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1287964