Humidity-sensing element

Details Humidity-sensing element Humidity-sensing element

H - Electricity

01

C

H01C 7/00 (2006.01) G01N 27/12 (2006.01)

Patent

CA 2053293

ABSTRACT A calcined or sintered material made from a ferroelectric metal oxide having a basic composition which is given by (Pb1-xLax)(ZryTi1-y)1-x/4O3 o<x?0.25, 0<y<1 is employed in ground form as a substrate material for a humidity-sensing element. More specifically, the substrate material is molded into a sheet with a size of 6 x 6 mm and a thickness of 0.5 mm and then sintered in the atmosphere for a several hours at 800 to 1100°C to form a substrate. The resulting substrate is dipped for several seconds in an aqueous solution of 0.05 mol/R or more of an alkali metal phosphate. After drying, the substrate is heat-treated in the atmosphere for several hours at 600°C to 900°C, thereby covering the entire surface of the porous substrate with an alkali metal phosphate. As shown in Fig. 1, gold opposing electrodes 2 are formed on both surfaces, respectively, of a humidity-sensing member 1 by vacuum deposition, and a lead wire 3 is attached to each electrode by use of an electrically conductive resin adhesive to form a humidity- sensing element with a sandwich structure. Further, the resulting element is allowed to stand for several days under high temperature and humidity conditions (60 to 90°C, 80 to 95%RH). The humidity-sensing element exhibits an impedance of 1 M.OMEGA. when the relative humidity is 0% at 30°C and an impedance of 3 K.OMEGA. when the relative humidity is 90% at 30°C. Thus, the impedance changes in a range where a general measuring -15- circuit can be readily combined with the humidity-sensing element. In addition, the humidity-sensing element has substantially no change with time and a small temperature coefficient.

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