Humidity sensor, material thereof and method

Details Humidity sensor, material thereof and method Humidity sensor, material thereof and method

G - Physics

01

N

340/139, 73/71

G01N 27/04 (2006.01)

Patent

CA 1217653

-16- ABSTRACT OF THE DISCLOSURE A humidity sensitive semiconductor device comprising an insulating base member and a humidity sensitive coating on said base member having at least two spread apart metal electrodes connected thereto, the coating comprising a metal oxide of a lanthanide cobaltate of the formula L1-xSrxCoO3 where L is a member of the lanthanide series of elements selected from the group lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium and x is from about 0 to 0.5.

453518

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