Hydrogen adsorption device for detection of hydrogen

G - Physics – 01 – N

Patent

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356/198, 73/69

G01N 27/22 (2006.01) G01N 27/414 (2006.01) H01L 29/00 (2006.01) H01L 29/78 (2006.01)

Patent

CA 1054823

ABSTRACT OF THE DISCLOSURE A method of and an apparatus for the detection of hydrogen is described. The method and apparatus employ a semiconductor, a metal electrode and an insulator situated between the semiconductor and the electrode. The metal electrode is made of palladium, nickel, platinum or an alloy containing at least twenty percent (20%) palladium. In one embodiment the apparatus is a field effect transistor. In another it is a capacitor. A heater is also provided for heating the apparatus for improving its response time.

234905

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