G - Physics – 01 – N
Patent
G - Physics
01
N
356/198, 73/69
G01N 27/22 (2006.01) G01N 27/414 (2006.01) H01L 29/00 (2006.01) H01L 29/78 (2006.01)
Patent
CA 1054823
ABSTRACT OF THE DISCLOSURE A method of and an apparatus for the detection of hydrogen is described. The method and apparatus employ a semiconductor, a metal electrode and an insulator situated between the semiconductor and the electrode. The metal electrode is made of palladium, nickel, platinum or an alloy containing at least twenty percent (20%) palladium. In one embodiment the apparatus is a field effect transistor. In another it is a capacitor. A heater is also provided for heating the apparatus for improving its response time.
234905
Lundkvist Leif S. T.
Lundstrom Ingemar
Shivaraman Somanathan
Svensson Christer
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