Hydrogen-selective sensor and manufacturing method therefor

Details Hydrogen-selective sensor and manufacturing method therefor Hydrogen-selective sensor and manufacturing method therefor

G - Physics

01

N

324/23, 117/85

G01N 27/30 (2006.01) G01N 27/12 (2006.01)

Patent

CA 1204474

Abstract of the Disclosure A hydrogen-selective gas senor comprising a gas- sensing element including a semiconductor in a principal portion thereof, and a thin coat or layer inactive for oxidation of hydrogen formed over an entire surface of the gas-sensing element or at least on a surface of the semiconductor. The thin layer comprises one of silicon oxide, aluminum oxide, and silicon nitride, and is formed on the surface of the semiconductor by chemical deposition, the thin layer checking passage of molecules other than hydrogen molecules.

444091

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