Hydrogenated carbon compositions

Details Hydrogenated carbon compositions Hydrogenated carbon compositions

C - Chemistry, Metallurgy

23

C

23/13, 23/8, 204

C23C 14/06 (2006.01) C23C 16/26 (2006.01) C23C 16/30 (2006.01) C23C 16/50 (2006.01)

Patent

CA 2013282

0312s DE? 88-0077 Abstract A composition of matter having an atomic density between that of pure diamond and at least 0.18g-atoms per cubic centimeter and the formula: C1-z-wSizAw[H1-xFx]y where: 0?z+w?0.15, 0?w?0.05, 0?x?0.10, 0<y<1.5, and, A is boron or oxygen. Variation of the constituents and the parameters of production of the compositions in self-biasing RF cavities, or primary or secondary ion beam methods, allows formation of films of, for example, desired hardness, lubricity, density, electrical conductivity, permeability, adhesion and stress. Variation of the properties allows production of films formed by the composition as a function of depth.

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