Hydrogenation of photoresponsive semiconductor devices

Details Hydrogenation of photoresponsive semiconductor devices Hydrogenation of photoresponsive semiconductor devices

G - Physics

02

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G02F 1/19 (2006.01) G02F 1/015 (2006.01) G02F 1/03 (2006.01) G02F 1/035 (2006.01) H01L 31/0248 (2006.01) H01L 31/0256 (2006.01) H01L 31/0264 (2006.01) H01L 31/18 (2006.01) G02F 1/017 (2006.01)

Patent

CA 2148629

Hydrogenation of an optical device that includes an intrinsic region and at least one associated doped region is effective to improve the photoresponsivity of the device. Subsequent annealing of the device substantially restores the conductivity of the doped region(s) while preserving in the intrinsic region a major part of the beneficial effects of hydrogenation.

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