Hydrogenation process and apparatus for solid state devices

Details Hydrogenation process and apparatus for solid state devices Hydrogenation process and apparatus for solid state devices

C - Chemistry, Metallurgy

30

B

148/1, 356/176

C30B 31/00 (2006.01) H01L 21/30 (2006.01) H01L 21/3105 (2006.01)

Patent

CA 1163537

PRECIS DE LA DIVULGATION Le procédé, du type suivant lequel on crée un plasma d'hydrogène au voisinage des dispositifs à semi- conducteur, est caractérisé en ce qu'on applique des moyens aptes à éloigner des dispositifs les particules de plasma polarisés positivement.

355501

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