Ignition apparatus for arc sources

H - Electricity – 01 – J

Patent

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Details

H01J 37/32 (2006.01)

Patent

CA 2742870

The present invention relates to an ignition device for igniting a high- current discharge of an electrical arc evaporator in a vacuum coating system. Ignition is performed by means of mechanically closing and opening a contact between the cathode and the anode. Contact is established by means of an ignition finger that can move on a forced path. On account of the forced path, the ignition finger can be moved by means of a simple mechanical drive to a park position, which is protected against coating, and said ignition finger can also be used to ignite a second target.

La présente invention concerne un dispositif d'allumage pour amorcer une décharge de courant fort d'un évaporateur à arc électrique dans une installation de revêtement sous vide. L'allumage s'effectue par fermeture et ouverture mécaniques d'un contact entre la cathode et l'anode. Le contact est établi au moyen d'un doigt d'allumage déplaçable sur une trajectoire forcée. Du fait de la trajectoire forcée, le doigt d'allumage peut être amené au moyen d'un entraînement mécanique simple dans une position d'arrêt protégée contre le revêtement et peut en outre être utilisé pour allumer une deuxième cible.

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