B - Operations – Transporting – 05 – D
Patent
B - Operations, Transporting
05
D
117/64
B05D 1/32 (2006.01) G03F 7/16 (2006.01) G03F 7/40 (2006.01)
Patent
CA 1123683
AN IMPROVED IMAGE HARDENING PROCESS Abstract of the Disclosure Resist images are hardened so that they are flow resistant at elevated temperatures by coating the image with a layer of a porous metal or metal oxide. YO978-026
362153
Canavello Benjamin J.
Hatzakis Michael
International Business Machines Corporation
Na
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