Image reversal negative working photoresist

Details Image reversal negative working photoresist Image reversal negative working photoresist

G - Physics

03

F

G03F 7/008 (2006.01) G03F 7/022 (2006.01) G03F 7/20 (2006.01) G03F 7/38 (2006.01)

Patent

CA 2042735

ABSTRACT A process for converting a normally positive working photosensitive composition to a negative working composition is disclosed. One forms a composition containing an alkali soluble resin, a 1,2 quinone diazide-4-sulfonyl compound and an acid catalyzed crosslinker in a solvent mixture. After drying and imagewise exposing, the composition is baked and developed to produce a negative image. The image-reversal negative-working photoresists of this invention have superior storage stability and shelf life.

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