Image sensor with recessed planarizing layers and method for...

Details Image sensor with recessed planarizing layers and method for... Image sensor with recessed planarizing layers and method for...

H - Electricity

01

L

H01L 27/146 (2006.01) H01L 23/367 (2006.01) H01L 25/07 (2006.01) H01L 31/0216 (2006.01)

Patent

CA 2460394

The invention concerns a method for making image sensors, and in particular colour image sensors. The image sensor comprises a zone (MP) whereon is located a photosensitive matrix on which is projected the image to be converted into electric signals, and an outer zone (ZE) including peripheral electronic circuits, for controlling the matrix or for processing image signals. After forming on a substrate (30) a stack of conductive layers and insulating layers for producing the matrix and the peripheral circuits, it consists in removing only in the zone (MP) of the matrix a substantial thickness of insulation before depositing a mosaic of coloured filters, so as to reduce the height H1 of the filters relative to the photosensitive zones, thereby improving contrast and colorimetry.

L'invention concerne la fabrication des capteurs d'image, et notamment les capteurs d'image en couleurs. Le capteur d'image comporte une zone MP dans laquelle se situe une matrice photosensible sur laquelle est projetée l'image à convertir en signaux électroniques, et une zone extérieure ZE comportant des circuits électroniques périphériques, pour la commande de la matrice ou le traitement des signaux d'image. Après formation sur un substrat (30) d'un empilement de couches conductrices et de couches isolantes servant à la réalisation de la matrice et des circuits périphériques, on enlève, uniquement dans la zone MP de la matrice, une épaisseur importante d'isolant avant de déposer une mosaïque de filtres colorés, afin de réduire l'altitude H1 des filtres par rapport aux zones photosensibles. Il en résulte une amélioration du contraste et de la colorimétrie.

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