Imaging method for manufacture of microdevices

Details Imaging method for manufacture of microdevices Imaging method for manufacture of microdevices

G - Physics

03

F

G03F 7/20 (2006.01) H01L 21/77 (2006.01)

Patent

CA 2216296

An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions, is disclosed which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the first and second directions, respectively; and illuminating the pattern with light from the light source.

Méthode de formation d images permettant de créer un motif détaillé ayant des caractéristiques linéaires qui se prolongent dans deux directions orthogonales. La méthode se caractérise par : une source lumineuse ayant des sections d intensité lumineuse décroissantes en son centre ainsi que le long d un premier et d un deuxième axes, lesquels sont conçus pour s intersecter au centre et se prolonger dans les deux directions respectivement; et par l'éclairage du motif à l aide de la source lumineuse.

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