Imaging method for manufacture of microdevices

Details Imaging method for manufacture of microdevices Imaging method for manufacture of microdevices

H - Electricity

01

L

H01L 21/027 (2006.01) G03F 7/20 (2006.01)

Patent

CA 2061499

An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions, is disclosed which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the first and second directions, respectively; and illuminating the pattern with light from the light source.

Méthode d'imagerie pour produire une image d'un motif fin ayant des éléments linéaires suivant une première et une deuxième directions orthogonales. La méthode consiste à fournir une source lumineuse ayant des secteurs d'intensité réduite en son centre et sur un premier et un deuxième axes définis de façon à se croiser au centre et suivant la première et la deuxième directions, respectivement; et à illuminer le motif avec la lumière provenant de la source lumineuse.

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