Imaging system

G - Physics – 01 – N

Patent

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Details

G01N 21/64 (2006.01) G02B 21/00 (2006.01) G02B 21/06 (2006.01)

Patent

CA 2234950

An imaging system operates at the diffraction limit of the optics to which it is connected and outputs a signal representative of a sample (S) lying in the sample plane (17). The system comprises a cathode ray tube (30), an optical lens system (10'), and a means for sensing (40). The cathode ray tube (30) comprises an electron gun (34) for generating an electron beam (35) in a raster pattern. The electron beam (35) is adapted to produce an illuminated spot (39a) that scans correspondingly in the raster pattern and wherein the spot (39a) is positioned in an object plane (26). The optical lens system (10') focuses in a diffraction limited manner, the object plane (26) on to the sample plane (17), such that the image of the spot (39b) is the smallest diffraction limited size as determined by the optical lens system (10').

Un système d'imagerie fonctionne à la limite de diffraction de l'optique sur laquelle il est connecté et produit un signal de sortie repésentant un échantillon (S) se trouvant dans le plan (17) de l'échantillon. Le système comprend un tube à rayon cathodique (30), un système à lentille optique (10') et un dispositif de détection (40). Le tube à rayon cathodique (30) comprend un canon à électrons (34) qui génère un faisceau d'électrons (35) suivant une configuration de trame. Le faisceau d'électrons (35) est adapté pour produire un point ou spot éclairé (39A) qui balaie de manière correspondante la configuration de trame, le spot (39a) étant positionné dans un plan d'objet (26). Le système à lentille optique (10') focalise de manière limitée en diffraction le plan d'objet (26) sur le plan d'échantillon (17), de sorte que l'image du spot (39b) ait la taille limitée en diffraction la plus petite, comme déterminée par le système à lentille optique (10').

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