Imaging technique for use with optical mems devices

Details Imaging technique for use with optical mems devices Imaging technique for use with optical mems devices

G - Physics

02

B

G02B 26/08 (2006.01) G02B 6/35 (2006.01)

Patent

CA 2384072

Using an imaging system, an optical MEMS devices is imaged so that in combination with an actual one or more other optical MEMS devices, or images thereof, a single virtual optical MEMS device is formed that has the size of each of the optical MEMS devices combined. The physical size of the arrangement may be reduced by compacting the optical path, e.g., using appropriate conventional mirrors, and/or employing folded arrangements, i.e., arrangements in which there is only one MEMS device stage that does double duty for both input and output through the use of at least one conventional mirror. The imaging system may reproduce the angle of reflection of the light from the micro mirror, e.g., using a telecentric system. A prism may be employed to align the various optical MEMS devices, or images thereof.

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