Implantation of vaporized material on melted substrates

Details Implantation of vaporized material on melted substrates Implantation of vaporized material on melted substrates

C - Chemistry, Metallurgy

30

B

204/96.03, 204/1

C30B 31/22 (2006.01) C23C 14/02 (2006.01) C23C 14/48 (2006.01) C30B 1/02 (2006.01)

Patent

CA 1150668

Abstract Implantation of a particle flux, for example a laser produced particle flux, upon a substrate is enhanced by premelting the substrate surface with a beam of radiation from a pulsed high energy source such as a laser source. The premelting is provided prior to the arrival of the particle flux in order that the particle flux impinge upon an area of the substrate which is melted. (Figure 1)

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