Improved cmp products

Details Improved cmp products Improved cmp products

C - Chemistry, Metallurgy

09

K

C09K 3/14 (2006.01) B24B 37/04 (2006.01) B24D 3/28 (2006.01) B24D 3/34 (2006.01) C09G 1/02 (2006.01)

Patent

CA 2383504

Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.

Selon l'invention, des matériaux abrasifs contenant des particules d'alumine transitionnelle recouvertes de silice, dont la taille moyenne est inférieure à 50 nanomètres, et présentant une surface BET d'au moins 50 m?2¿/g, sont utiles dans des procédés de planarisation mécano-chimiques, sous la forme de suspensions ou sous la forme d'abrasifs fixés.

Affiliated with

Also associated with

Rating

Improved cmp products does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Improved cmp products, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Improved cmp products will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-2074790