Improved compact disc spin coater

Details Improved compact disc spin coater Improved compact disc spin coater

B - Operations, Transporting

05

C

B05C 11/08 (2006.01)

Patent

CA 2230068

An apparatus (1) for the spin coating of substrates comprising: means for carrying a substrate (28); motor means (26) for rotating said substrate carrier means (24); a spinning bowl (22) surrounding said substrate carrier means (24); and aperture means (20) at least partially covering said spinning bowl (22) for diminishing the escape of fumes into the ambient atmosphere during the spin coating of a substrate (28) carried by said substrate carrier means (24).

La présente invention concerne un appareil (1) servant au revêtement de substrats (28) par centrifugation. Il comprend un support de substrat (28), un moteur (26) pour faire tourner ce support (24) de substrat, une cuvette tournante (22) qui entoure le support (24) de substrat, un élément à ouverture (20) recouvrant, au moins en partie, cette cuvette tournante (22) pour réduire l'échappement de vapeurs dans l'atmosphère ambiante.

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