Improved micro-machined suspension plate with integral proof...

G - Physics – 01 – V

Patent

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G01V 1/18 (2006.01) G01P 15/125 (2006.01)

Patent

CA 2564680

An accelerometer or a seismometer (1) using an in-plane suspension geometry having a suspension plate (2, 201) and at least one fixed capacitive plate (3a- b). The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements (6, 202), and an integrated proof mass (201) between the flexures. The flexural elements (202) allow the proof mass to move in the sensitive direction in the plane of suspension while restricting movement in all off-axis directions. Off-axis motion of the proof mass is minimized by the use of intermediate frames (204) disbursed within and between the flexural elements (202). Intermediate frames can include motion stops to prevent further relative motion during overload conditions. The device can also include a dampening structure, such as a spring or gas structure that includes a trapezoidal piston and corresponding cylinder, to provide damping during non-powered states.

Cette invention concerne un accéléromètre ou un sismomètre utilisant une géométrie de suspension dans le plan comportant une plaque de suspension et au moins une plaque capacitive fixe. La plaque de suspension est formée en une seule pièce et comprend un cadre extérieur, une paire d'éléments de flexion et une masse étalon intégrée entre les éléments de flexion. Les éléments de flexion permettent à la masse étalon de se déplacer dans la direction sensible dans le plan de suspension, tout en limitant les mouvements dans toutes les directions hors axe. Le mouvement hors axe de la masse étalon est minimisé grâce à des cadres intermédiaires répartis dans et entre les éléments de flexion. Ces cadres intermédiaires peuvent comporter des butées de mouvement pour empêcher tout autre mouvement relatif pendant les surcharges. Ce dispositif peut également comprendre une structure d'amortissement, telle qu'une structure pneumatique ou à ressort, qui comprend un piston trapézoïdal et un cylindre correspondant, pour assurer la fonction d'amortissement pendant les périodes non motorisées.

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