Improved microcantilever stress sensor for fluid analysis

Details Improved microcantilever stress sensor for fluid analysis Improved microcantilever stress sensor for fluid analysis

G - Physics

01

N

G01N 5/02 (2006.01) B81B 3/00 (2006.01) G01G 3/12 (2006.01)

Patent

CA 2526731

This invention relates to a microcantilever stress sensor for detecting and quantifying low levels of contaminants in liquids and gases. The invention uses a chemical agent to impart chemical specificity to the microcantilever stress sensor. The microcantilever deflects when the chemical agent is replaced by a more strongly adsorbing chemical species. The magnitude of the deflection is then used as a measure of the quantity of contaminant present.

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