G - Physics – 01 – F
Patent
G - Physics
01
F
G01F 1/68 (2006.01) G01F 1/684 (2006.01) G01P 5/12 (2006.01) G01P 13/02 (2006.01)
Patent
CA 2098285
2098285 9210726 PCTABS00013 A solid state microanemometer (10) is micromachined from a crystal to a shape with four thick external sides (14, 15, 16, 17) that define an outer rectangle, four thin sections (24, 25, 26, 27) that define an inner rectangle and four diagonally directed branches (18, 19, 20, 21) interconnecting the corners of the outer rectangle to the inner rectangle. Four semiconductor resistors (34, 35, 36, 37) located on the four inner sections (24, 25, 26, 27) form a sensing bridge. Each external side (14, 15, 16, 17) has a pair of electrical contacts (43 and 44, 51 and 52, 59 and 60, 67 and 68) that are electrically interconnected, via conductive leads (39 and 40, 47 and 48, 55 and 56, 63 and 64) that extend along the diagonal branches and partially along the inner sections, to one of the semiconductor resistors (34, 35, 36, 37). The physically connected semiconductor resistors (34, 35, 36, 37) and external sides (14, 15, 16, 17) form a rugged solid state device (10), while thermal and electrical isolation of the resistors (34, 35, 36, 37) from each other permits higher operating temperatures and improved fluid flow sensing capability.
Macrae & Co.
University Of Cincinnati
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