Improved thermosetting anti-reflective coatings at deep...

Details Improved thermosetting anti-reflective coatings at deep... Improved thermosetting anti-reflective coatings at deep...

G - Physics

03

C

G03C 1/492 (2006.01) C08F 8/00 (2006.01) C08F 283/10 (2006.01) C09D 133/06 (2006.01) G03C 1/815 (2006.01) G03F 7/09 (2006.01)

Patent

CA 2301020

Anti-reflective coating compositions having improved etchrate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate.

La présente invention concerne des compositions de revêtement antireflet présentant notamment une meilleure vitesse d'attaque, préparées à partir de certains copolymères et polymères de poids moléculaire élevé, particulièrement le méthacrylate de glycidyle.

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