Improving graphoepitaxy

Details Improving graphoepitaxy Improving graphoepitaxy

H - Electricity

01

L

356/141, 356/162

H01L 21/268 (2006.01) C30B 1/00 (2006.01) C30B 1/08 (2006.01) C30B 25/18 (2006.01)

Patent

CA 1139453

352906 ABSTRACT OF THE DISCLOSURE Improvements to graphoepitaxy include use of irradia- tion by electrons, ions or electromagnetic or acoustic radiation to induce or enhance the influence of artificial defects on crystallo- graphic orientation; use of single defects; and use of a relief structure that includes facets at 70.5 and/or 109.5 degrees.

352906

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