In situ etching of gallium arsenide during vapor phase...

Details In situ etching of gallium arsenide during vapor phase... In situ etching of gallium arsenide during vapor phase...

H - Electricity

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148/2.4

H01L 21/306 (2006.01) H01L 21/205 (2006.01) H01L 29/00 (2006.01)

Patent

CA 966764

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