Infrared emitter and methods for fabricating the same

G - Physics – 01 – J

Patent

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G01J 3/10 (2006.01) G01J 1/08 (2006.01) H05B 3/14 (2006.01) H05B 3/20 (2006.01)

Patent

CA 2230999

A thin film infrared emitter comprises electrically conducting diamond-like carbon in a freely suspended membrane or deposited on a substrate with low thermal capacity and diffusivity. On applying an electric current through the film, the latter is heated and emits infrared radiation. Topographic microstructures in the surface of the film influences the intensity of the radiation, its spectral characteristics and its polarisation state. The film is formed by deposition from gas or vapour phase on a substrate which in advance has been provided with embedded electric feed conductors. In embodiments of the invention with a self-supporting membrane the feed conductors also act as a support for the membrane after removing the substrate material by means of physical or chemical processes.

Emetteur à infrarouge à couche mince comprenant un carbone électroconducteur tel que le diamant placé dans une membrane librement suspendue ou déposée sur un substrat à faible capacité et diffusivité thermiques. En appliquant un courant électrique dans la couche, cette dernière chauffe et émet un rayonnement infrarouge. Des microstructures topographiques à la surface de la couche ont une influence sur l'intensité du rayonnement, ses caractéristiques spectrales et son état de polarisation. La couche est formée par dépôt à partir en phase gazeuse ou en phase vapeur sur un substrat dans lequel ont été auparavant encastrés des conducteurs d'alimentation électrique. Selon certaines réalisations à membrane autoporteuse, les conducteurs servent également de support à la membrane après élimination du matériau du substrat par des procédés physiques ou chimiques.

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