Infrared radiation detector

Details Infrared radiation detector Infrared radiation detector

G - Physics

01

J

345/14

G01J 5/20 (2006.01) H01L 37/02 (2006.01)

Patent

CA 1184642

ABSTRACT An infrared radiation detector in which a stable substrate has a hole through it and a pair of bonding pads on two opposite sides of the hole, the hole being covered by a pellicle of insulating or semi-conductor material with supports over the hole, a detector element comprising an ultrathin infrared absorbing film of nickel, palladium, platinum or iridium less than 10 nm thick or a gold film less than 20 nm thick, two sides of the detector element connecting to the bonding pads by thin film contacts.

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