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C - Chemistry, Metallurgy

23

C

C23C 16/16 (2006.01) C23C 16/48 (2006.01)

Patent

CA 2001009

The invention provides an apparatus for metal plating a substrate. The apparatus includes a chamber adapted to receive metal carbonyl gas. The chamber includes an infrared transparent window. The infrared transparent window has a cooling passage filled with liquid coolant. The liquid coolant has a temperature below which decomposition of the metal carbonyl gas occurs. The liquid coolant prevents decomposition of the metal carbonyl gas on the infrared transparent window. The liquid coolant also is substantially infrared transparent for allowing infrared radiation through the infrared transparent window arid cooling passage into the chamber. An infrared radiation source sends infrared radiation into the chamber through the infrared transparent window and cooling passage to heat the substrate to a temperature at which decomposition of the metal carbonyl gas occurs.

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