H - Electricity – 01 – L
Patent
H - Electricity
01
L
204/96.05
H01L 21/3213 (2006.01) C23C 8/02 (2006.01) C23C 8/36 (2006.01)
Patent
CA 1183803
ABSTRACT Bromine-containing plasma is utilized to inhibit corrosion o, aluminun or aluminum alloy films which have been etched utilizing a chlorinated plasma.
414269
Fairchild Camera And Instrument Corporation
Smart & Biggar
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