Inspection apparatus

Details Inspection apparatus Inspection apparatus

G - Physics

02

B

88/113

G02B 27/40 (2006.01) G01N 21/95 (2006.01) G02B 7/30 (2006.01)

Patent

CA 2003734

ABSTRACT An optical apparatus including focusing means (41), an optical axis, an object point (31) and an image point on said optical axis, said object point being movable along the optical axis with respect to the focusing means, means being provided to change the effective optical distance between either the object point and the focusing means or between the image point and the focusing means to maintain the object point at a fixed point even if the image point moves.

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