Inspection apparatus including photodetection and scanning...

Details Inspection apparatus including photodetection and scanning... Inspection apparatus including photodetection and scanning...

G - Physics

01

N

340/124.5

G01N 21/89 (2006.01)

Patent

CA 1269739

ABSTRACT An inspection apparatus for inspecting, for example, sheet material, in which a beam of radiation 12 is scanned across a sheet 13 by means of a first facet 41 of a rotating mirror drum 22. Scattered radiation from the sheet is received by a second facet 46 and 2 is passed to a photodetector 49 for analysis.

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