G - Physics – 01 – N
Patent
G - Physics
01
N
G01N 21/90 (2006.01) G01N 21/88 (2006.01)
Patent
CA 2051062
ABSTRACT OF THE DISCLOSURE An inspection method for detecting existence or not of a defect on an inspected object in which an image of the inspected object irradiated by a light is picked by a video camera and a video signal therefrom is processed by an electronic processor is disclosed in which there are such steps of setting up a pattern judging window on the inspected object to thereby judge whether or not there exists a pattern on the inspected object, setting up a plurality of inspection windows when it is judged that there is no pattern on the inspected object to thereby perform a predetermined defect inspection on portions of the inspected object within the plurality of inspection windows, setting up a pattern discrimination window on the inspected object when it is judged that there exists a pattern to thereby discriminate a kind of the pattern, and either setting up the inspection window or another inspection window dependent on the kind of the pattern discriminated. An inspection apparatus carrying out the above method is also disclosed which is formed of first means for setting up a pattern judging window on the inspected object to thereby judge whether or not there exists a pattern on the inspected object, a second means for setting up a plurality of inspection windows when it is judged that there is no pattern on the inspected object to thereby perform a predetermined defect inspection on portions of the inspected object within the plurality of inspection windows, a third means for setting up a pattern discrimination window on the inspected object when it is judged that there exists a pattern to thereby discriminate a kind of the pattern, and a fourth means for either setting up the inspection windows or another inspection window dependent on the kind of the pattern discriminated.
Gowling Lafleur Henderson Llp
Hajime Industries Ltd.
Yoshida Hajime
LandOfFree
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