G - Physics – 01 – N
Patent
G - Physics
01
N
G01N 21/95 (2006.01) G01B 11/25 (2006.01) G01B 11/30 (2006.01)
Patent
CA 2703360
An inspection system (10) comprises a light source (20), a grating (23), a phase shifting unit, an imager (30), and a processor (11). The light source (20) is configured to generate light. The grating (23) is in a path of the generated light and is configured to produce a grating image after the light passes through the grating (23). The phase shifting unit is configured to form and reflect a plurality of phase shifted patterns of the grating image onto an object surface (16) to form a plurality of projected phase shifting patterns. The imager (30) is configured to obtain image data of the projected phase shifted patterns. The processor (11) is configured to reconstruct the object surface from the image data. An inspection method is also presented.
Abramovich Gil
Harding Kevin George
Isaacs Ralph Gerald
Ross Joseph Benjamin
Song Guiju
Company General Electric
Craig Wilson And Company
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