Instrument for measuring physical property of sample

G - Physics – 01 – N

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G01N 21/45 (2006.01) G01B 11/06 (2006.01) G01D 5/26 (2006.01) H01L 21/66 (2006.01)

Patent

CA 2368320

The invention provides an apparatus for measuring the physical properties of a sample by optically monitoring the response of the sample to illumination by ultrashort optical pulses. The apparatus forms a common path optical interferometer of a Sagnac type that can measure physical properties at normal incidence. The interferometer is a single-arm Sagnac interferometer featuring two beam splitters. Measurement is performed in such a manner that a sample (14) is excited by a beam of ultrashort optical pulses, and variations in intensity and phase of another optical beam are detected. This enables a wide range of measurement of physical properties such as thickness, sound velocity, and thermal properties of substances.

L'invention concerne un instrument permettant de mesurer une propriété physique d'un échantillon par détection optique de la réaction dudit échantillon à la projection d'une impulsion optique ultracourte. L'invention concerne en outre un interféromètre optique à trajet commun de Sagnac destiné à mesurer une propriété physique à angle d'entrée vertical. L'interféromètre de Sagnac, du type à un bras, possède deux séparateurs de faisceaux. Un échantillon (14) est excité par une impulsion optique ultracourte. On mesure alors les changements de résistance et de phase du faisceau optique provoqués par l'excitation. On peut donc mesurer une grande variété de propriété physique, par exemple l'épaisseur d'un objet, la vitesse d'un son ou une propriété thermique.

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