H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/149
H01L 29/08 (2006.01) H01L 29/10 (2006.01) H01L 29/78 (2006.01)
Patent
CA 1181532
- 1 - Abstract: An insulated gate field effect transistor is formed in one surface of a semiconductor substrate. The surface portion of a channel has an impurity distribution of the conduction type opposite that of the substrate, and the deeper portion has an impurity distribution of the same conduction type as that of the substrate. At least one of a source and a drain is formed of an impurity layer of the conduction type opposite that of the substrate with its impurity distribution gently sloped by double diffusion processes. The result is to depress the undesirable short- channel effect experienced by prior transistor constructions and to raise the breakdown voltage.
409942
Kamigaki Yoshiaki
Masuda Hiroo
Shimohigashi Katsuhiro
Sunami Hideo
Takeda Eiji
Hitachi Ltd.
Kirby Eades Gale Baker
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