Integral color filter for solid-state imaging device

Details Integral color filter for solid-state imaging device Integral color filter for solid-state imaging device

G - Physics

02

B

345/1

G02B 5/20 (2006.01) G03F 7/00 (2006.01) H01L 27/148 (2006.01) H01L 31/0216 (2006.01)

Patent

CA 1078052

INTEGRAL COLOR FILTER FOR SOLID-STATE IMAGING DEVICE Abstract of the Disclosure A method for making a color imaging device which comprises means for sensing radiation comprising a planar array of charge-handling semiconductive photosensors, at least some of the photosensors having a radiation-sensing area with at least one dimension less than about 100 microme- ters and, superimposed thereon, filter means for controlling access of radiation to the sensing means. The filter means comprises a transparent, polymeric dye-receiving layer for receiving heat-transferable dyes and further comprises a plurality of radiation-intercepting means defining a planar array of filter elements lying in the receiving layer in microregistration with the sensing areas of the photosen- sors. The filter area of each intercepting means contains at least one heat-transferable dye transferred to the dye- receiving layer by heating and diffusion. The heat-transferable dye absorbs radiation in at least one portion of the spec- trum and transmits radiation in at least one other portion of the spectrum. The color imaging device comprises an interlaid pattern having at least two sets of dye-intercepting means, the first set having a radiation absorption and transmission characteristic different from that of the second set. The heat-transferable dye is diffused into the dye-receiving layer at an elevated temperature through window areas in a photoresist layer. -1-

286449

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