Integrated ambient sensing devices and methods of manufacture

Details Integrated ambient sensing devices and methods of manufacture Integrated ambient sensing devices and methods of manufacture

G - Physics

01

N

356/149, 324/23

G01N 27/26 (2006.01) G01N 27/333 (2006.01) G01N 27/414 (2006.01)

Patent

CA 1238950

INTEGRATED AMBIENT SENSING DEVICES AND METHODS OF MANUFACTURER ABSTRACT Methods are disclosed for forming multi-element ambient sensing devices on a single monolithic substrate such as a silicon planar device using photolithographic techniques to pattern a multiplicity of chemically sensitive layers while taking into account the range of materials to the patterned and the problems of their cross-contamination when in contact.

472439

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