Integrated circuit device having monolithic rf shields

Details Integrated circuit device having monolithic rf shields Integrated circuit device having monolithic rf shields

H - Electricity

01

L

356/141

H01L 29/00 (2006.01) H01L 21/60 (2006.01) H01L 23/498 (2006.01) H01L 23/66 (2006.01)

Patent

CA 963977

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