Integrated circuit test structure

Details Integrated circuit test structure Integrated circuit test structure

H - Electricity

01

L

356/117

H01L 21/66 (2006.01) G01R 31/28 (2006.01) H01L 21/68 (2006.01) H01L 23/544 (2006.01)

Patent

CA 1049155

INTEGRATED CIRCUIT ?ST STRUCTURE ABSTRACT A complex test structure for integrated, semiconductor circuits in which the impurity regions of the test device are elongated, preferably in serpentine fashion. The elongated impurity regions emulate corresponding regions in regular integrated circuit devices. Additional regions are provided, each in elongated form, which, when impressed with appropriate voltage or currents, provide indications of defect evels and product yield in the regular devices. Advantageously, the serpentine test structure is fabricated on the same wafer and with the same process steps as the regular integrated circuit chips. In one embodiment, a plurality of such monitors are provided adjacent each other in the same test site. Regions in one monitor are selectively connected to regions in another monitor and to external contact pads by contact stations disposed between each monitor.

278400

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