Integrated force balanced accelerometer

Details Integrated force balanced accelerometer Integrated force balanced accelerometer

G - Physics

01

P

73/42

G01P 15/125 (2006.01) G01P 15/08 (2006.01) G01P 15/13 (2006.01)

Patent

CA 1273222

56-204F INTEGRATED, FORCE BALANCED ACCELEROMETER ABSTRACT An accelerometer fabricated from a semiconductor substrate sandwiched between two non-conductive plates is shown having an inertial mass formed by etching the sub- strate. The mass is joined to the substrate by hinges having crossed blades to provide flexure in one direction and rigidity in other directions. The fabrication tech- nique permits the integration of accelerometer servo and signal processing circuitry upon the same substrate in which the accelerometer mass is formed.

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