Integrated ir source and acoustic detector for photoacoustic...

Details Integrated ir source and acoustic detector for photoacoustic... Integrated ir source and acoustic detector for photoacoustic...

G - Physics

01

N

G01N 29/14 (2006.01) H01K 1/26 (2006.01) H01K 7/00 (2006.01)

Patent

CA 2741788

A photoacoustic gas detector includes an integrated source, infrared filter and an acoustic sensor. The source, filter and acoustic sensor can be integrated onto one or more semiconductor substrates, such as silicon. Processing circuitry can also be integrated onto the substrate. Further, the source, filter and acoustic sensor can be integrated into a single component package, such as a metal can transistor package.

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