Integrated microcolumn and scanning probe microscope arrays

Details Integrated microcolumn and scanning probe microscope arrays Integrated microcolumn and scanning probe microscope arrays

H - Electricity

01

J

H01J 37/317 (2006.01) G03F 9/00 (2006.01) H01J 37/28 (2006.01) H01J 37/304 (2006.01)

Patent

CA 2336670

An apparatus for surface inspection and processing of a wafer (12) includes a microcolumn (14) and an associated scanning probe microscope (16). The microcolumn enables high speed scanning of the wafer at a relatively high resolution, while the scanning probe microscope provides atomic resolution of highly localized areas of the wafer. The microcolumn and scanning probe microscope can be partially fabricated out of the same substrate. Additionally, the microcolumn and scanning probe microscope can be a portion of an array of microcolumns and/or scanning probe microscopes. The apparatus may be used for imaging, lithography and spectroscopy.

L'invention concerne un appareil destiné à l'inspection superficielle et au traitement d'une plaquette. Ledit appareil comprend une microcolonne et un microscope-sonde à balayage. Ladite microcolonne permet le balayage à grande vitesse et à haute résolution de la plaquette alors que le microscope-sonde à balayage permet une résolution atomique pour des zones extrêmement précises de la plaquette. La microcolonne et le microscope-sonde à balayage peuvent être, en partie, fabriqués à partir du même substrat. En outre, la microcolonne et le microscope-sonde à balayage peuvent faire partie d'un réseau de microcolonnes et/ou de microscopes-sondes à balayage. L'appareil peut être utilisé pour l'imagerie, la lithographie et la spectroscopie

Affiliated with

Also associated with

Rating

Integrated microcolumn and scanning probe microscope arrays does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated microcolumn and scanning probe microscope arrays, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated microcolumn and scanning probe microscope arrays will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1476410